Patterned strained semiconductor substrate and device
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United States of America Patent
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Jun 9, 2015
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app pub date -
Jan 12, 2010
filing date -
Jul 23, 2004
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Abstract
A device that includes a pattern of strained material and relaxed material on a substrate, a strained device in the strained material, and a non-strained device in the relaxed material. The strained material may be silicon (Si) in either a tensile or compressive state, and the relaxed material is Si in a normal state. A buffer layer of silicon germanium (SiGe), silicon carbon (SiC), or similar material is formed on the substrate and has a lattice constant/structure mis-match with the substrate. A relaxed layer of SiGe, SiC, or similar material is formed on the buffer layer and places the strained material in the tensile or compressive state. Carbon-doped silicon or germanium-doped silicon may be used to form the strained material. The structure includes a multi-layered substrate having strained and non-strained materials patterned thereon.
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