Compression member for use in showerhead electrode assembly
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United States of America Patent
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Jun 16, 2015
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app pub date -
May 9, 2012
filing date -
May 9, 2012
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Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
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