Vibrator element, vibrator, oscillator, and electronic device
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United States of America Patent
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Jun 16, 2015
Grant Date -
Aug 1, 2013
app pub date -
Mar 8, 2013
filing date -
Jul 29, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.
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