Support construction, fixing element and method
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United States of America Patent
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Jun 23, 2015
Grant Date -
Aug 7, 2008
app pub date -
Oct 20, 2005
filing date -
Oct 20, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.
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