Measurement apparatus for measuring a surface shape of an object based on an interference signal
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United States of America Patent
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Jun 23, 2015
Grant Date -
Sep 12, 2013
app pub date -
Feb 25, 2013
filing date -
Mar 9, 2012
priority date (Note) -
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Abstract
The present invention provides a measurement apparatus which measures a measurement surface based on an interference signal obtained by causing measurement light reflected by the measurement surface and reference light reflected by a reference surface to interfere with each other, the apparatus including an interference optical system including a lens for focusing the measurement light to be incident on the measurement surface, and configured to cause the measurement light and the reference light to interfere with each other, and an adjusting device configured to adjust a focusing state of the measurement light focused by the lens such that a measurement point on the measurement surface positions within a range of a depth of focus of the lens, wherein the interference signal is obtained with the focusing state adjusted by the adjusting device.
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