Exposure apparatus and a method of manufacturing a device that conduct exposure using a set light source shape

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United States of America Patent

PATENT NO 9063406
APP PUB NO 20090257038A1
SERIAL NO

12407310

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Abstract

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An exposure apparatus that exposes a substrate to light having a set light source shape via a mask. The apparatus includes a plurality of light sources arrayed two-dimensionally. A light source control unit controls turning on and off of each of the plurality of light sources based on turning on and off information corresponding to the set light source shape by referring to a plurality of kinds of information on light source shapes, in which the plurality of light sources are arrayed two-dimensionally, and turning on and off information corresponding to the plurality kinds of information on the light source shapes.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamamoto, Tetsuya Utsunomiya, JP 577 12301

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