Semiconductor device reliability model and methodologies for use thereof

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United States of America Patent

PATENT NO 9064087
APP PUB NO 20150106780A1
SERIAL NO

14551693

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Abstract

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Systems and methods for semiconductor device reliability qualification during semiconductor device design. A method is provided that includes defining performance process window bins for a performance window. The method further includes determining at least one failure mechanism for each bin assignment. The method further includes generating different reliability models when the at least one failure mechanism is a function of the process window, and generating common reliability models when the at least one failure mechanism is not the function of the process window. The method further includes identifying at least one risk factor for each bin assignment, and generating aggregate models using a manufacturing line distribution. The method further includes determining a fail rate by bin and optimizing a line center to minimize product fail rate. The method further includes determining a fail rate by bin and scrapping production as a function of a manufacturing line excursion event.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bickford, Jeanne P Essex Junction, US 73 387
Habib, Nazmul South Burlington, US 65 436
Li, Baozhen South Burlington, US 176 791
Nsame, Pascal A Essex Junction, US 36 261

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