Thin film piezoelectric device

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United States of America Patent

PATENT NO 9065049
APP PUB NO 20140084749A1
SERIAL NO

13624573

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thin film piezoelectric device according to the present invention includes a pair of electrode layers and a piezoelectric thin film interposed between the pair of electrode layers, wherein the piezoelectric thin film contains a rare gas element and has a content gradient of the rare gas element in the thickness direction of the piezoelectric thin film.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aida, Yasuhiro Tokyo, JP 28 137
Kurachi, Katsuyuki Tokyo, JP 20 141
Maejima, Kazuhiko Tokyo, JP 29 301
Sakuma, Hitoshi Tokyo, JP 54 270

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