Nitrogen-free ozone generation unit and ozone gas supply system
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United States of America Patent
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Jun 30, 2015
Grant Date -
Jan 30, 2014
app pub date -
Apr 13, 2011
filing date -
Apr 13, 2011
priority date (Note) -
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Abstract
A gas pipe integrated block includes a plurality of internal pipe paths. The plurality of internal pipe paths are connected to a nitrogen-free ozone generator in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC, a gas filter, and an APC), a raw material gas supply port, and an ozone gas output port. Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.
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