Photolithographic structured thick layer sensor
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United States of America Patent
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Jun 30, 2015
Grant Date -
Mar 15, 2012
app pub date -
May 6, 2010
filing date -
May 11, 2009
priority date (Note) -
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Abstract
A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
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