Multiple frequency atomic force microscopy

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United States of America Patent

PATENT NO 9069007
APP PUB NO 20130340126A1
SERIAL NO

13903152

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Abstract

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An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS ASYLUM RESEARCH INC6310 HOLLISTER AVE GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Proksch, Roger B Santa Barbara, US 11 80

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