Charged particle beam apparatus sample holder with magnetic field generating element and sample holding element
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United States of America Patent
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Jun 30, 2015
Grant Date -
Oct 30, 2014
app pub date -
Apr 24, 2014
filing date -
Apr 25, 2013
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Abstract
The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam deflected by applying a magnetic field to a sample and provided with means for simply switching between a mode of observing a sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element including three or more magnetic gaps for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element that holds a sample on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps can be placed along an optical axis of a charged particle beam.
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