System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid
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United States of America Patent
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Jun 30, 2015
Grant Date -
Feb 24, 2011
app pub date -
Oct 17, 2007
filing date -
Oct 17, 2006
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Abstract
The present invention is directed to sonic-assisted systems mid methods of processing of substrates utilizing a sonic-treated liquid. In one embodiment, the sonic-treated liquid can be created by subjecting a desired processing liquid to sonic energy generated by a first sonic energy source prior to being applied So the substrate, The sonic-treated liquid is applied to the substrate where a second source of sonic energy applies sonic energy to the substrate. The sonic-treated liquid can be used as the coupling fluid between the second source of sonic energy and the substrate.
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