Method of manufacturing liquid discharge head

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United States of America Patent

PATENT NO 9073318
APP PUB NO 20140322835A1
SERIAL NO

14247445

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Abstract

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A method of manufacturing a liquid discharge head is provided. The method includes forming a heating element on a substrate in which a semiconductor element is arranged. The method further includes forming a protection layer to contact an upper surface of the heating element. Annealing is performed in a hydrogen-containing atmosphere before the step of forming the protection layer.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sasaki, Keiichi Yokohama, JP 63 870
Yasuda, Takeru Oita, JP 29 111
Yoshikawa, Masao Oita, JP 60 798

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