Physical quantity sensor and electronic apparatus

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United States of America Patent

PATENT NO 9073744
APP PUB NO 20130264661A1
SERIAL NO

13857317

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A physical quantity sensor includes a substrate, a movable body which has first and second sections and in which a first movable electrode section is provided in the first section, a beam section which supports the movable body so as to be able to be displaced, and a first fixed electrode section disposed on the substrate. The first fixed electrode section is provided at a position overlapping an end of the first section in the second axis direction in plan view, and is provided in a range of 0.0500X≦L≦0.816X assuming that the width of the first section in the second axis direction is X and the width of a portion of the first fixed electrode section in the second axis direction overlapping the movable body in plan view is L.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Satoru Chino, JP 336 3296

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