Wavelength tunable interference filter, method of manufacturing wavelength tunable interference filter, optical apparatus, and optical component
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United States of America Patent
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Jul 7, 2015
Grant Date -
Apr 3, 2014
app pub date -
Sep 30, 2013
filing date -
Oct 1, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A wavelength tunable interference filter, an optical apparatus, and an optical component include a first substrate, which includes a first optical film and a first driving electrode, and a second substrate, which includes a support portion that supports the first substrate, a second optical film, and a second driving electrode. The second substrate includes an external connection electrode extending to an outer side of the support portion, and includes an electrode forming surface on which the external connection electrode is disposed. A plurality of protruding portions protruding from the electrode forming surface are formed so as to be arrayed in a direction crossing the extending direction of the external connection electrode.
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