Method of producing magnesium fluoride coating, antireflection coating, and optical element

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United States of America Patent

PATENT NO 9079214
APP PUB NO 20130156973A1
SERIAL NO

13770890

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Abstract

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A method of producing a magnesium fluoride coating includes a step of forming a coating by applying a solution containing a fluorine-containing organic magnesium compound represented by the following formula to a base and a step of heat-treating the coating while the coating is being irradiated with a beam of light with a wavelength of 246 nm or less:

description='In-line Formulae' end='lead'Mg(CF3—X—COO)2  (1)description='In-line Formulae' end='tail'

wherein X represents a single bond or one of —(CF2)n—, —(CH2)m—, and —CH2CF2— that may have a substituent, where n and m each represent an integer of 1 to 4. The temperature of the heat-treating step can be 250° C. or lower. The coating can be irradiated with a beam of light with a wavelength of 185 nm or less.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Motokazu Yokohama, JP 69 228
Sakakibara, Teigo Tokyo, JP 59 363
Tanaka, Hiroyuki Kawasaki, JP 947 7696

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