Methods of patterning with protective layers

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United States of America Patent

PATENT NO 9079216
APP PUB NO 20130186856A1
SERIAL NO

13798087

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Abstract

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The embodiments disclose a method of fabricating servo integrated templates including depositing a protective layer on servo zone resist layer patterns, patterning integrated data zone features into a substrate, depositing a protective layer on data zones and removing the servo zone protective layer and patterning integrated servo zone features into the substrate and removing the data zone protective layer creating a substrate template used in fabricating data and servo zone integrated patterned stacks.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Yautzong Fremont, US 20 36
Lee, Kim Fremont, US 10 83
Wang, HongYing Fremont, US 28 78
Xiao, Shuaigang Fremont, US 50 300
Yang, XiaoMin Livermore, US 69 873

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