Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
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United States of America Patent
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Jul 14, 2015
Grant Date -
Sep 6, 2012
app pub date -
May 17, 2012
filing date -
Sep 27, 2005
priority date (Note) -
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Abstract
A velocity of Ar gas flow passing through between a lower end of a cylindrical body and a thermal shielding body is influenced by arrangement of a pulling path of single crystal silicon, a cylindrical body, and a thermal shielding body. Accordingly, the velocity of the Ar gas flow passing through between a lower end of the cylindrical body and the thermal shielding body is controlled by adjusting a relative position of the pulling path of the single crystal silicon, the cylindrical body, and the thermal shielding body. As described above, dust falling off to silicon melt can be reduced, thereby preventing deterioration in quality of the single crystal silicon.
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