Semiconductor device and fabrication method thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 14, 2015
Grant Date -
Mar 19, 2015
app pub date -
Aug 26, 2014
filing date -
Sep 18, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The semiconductor device fabrication method of the present invention includes: laminating a plurality of amorphous silicon films on a semiconductor substrate, forming through-holes that pass through the plurality of amorphous silicon films, and subjecting the plurality of amorphous silicon films 301 that include the through-holes to an etching process that uses an alkaline aqueous solution; wherein the plurality of amorphous silicon films is formed to include a first amorphous silicon film and a second amorphous silicon film in which the rate of etching by using the alkaline aqueous solution is slower than that of the first amorphous silicon film and the first amorphous silicon film is interposed between the semiconductor substrate and the second amorphous silicon film.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully