System and method for testing an electrostatic chuck

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United States of America Patent

PATENT NO 9082805
APP PUB NO 20120153971A1
SERIAL NO

13372423

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Abstract

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The present invention provides a reliable, non-invasive, electrical test method for predicting satisfactory performance of electrostatic chucks (ESCs). In accordance with an aspect of the present invention, a parameter, e.g., impedance, of an ESC is measured over a frequency band to generate a parameter functions. This parameter function may be used to establish predetermined acceptable limits of the parameter within the frequency band.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fang, Yan Fremont, US 65 194
Huang, Tuochuan Saratoga, US 23 689
McChesney, Jon Santa Clara, US 36 1314
Shih, Hong Santa Clara, US 104 3498
Ullal, Saurabh South San Francisco, US 24 228

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