Keyhole-free sloped heater for phase change memory

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United States of America Patent

PATENT NO 9082969
APP PUB NO 20130286726A1
SERIAL NO

13923759

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Abstract

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Subject matter disclosed herein relates to a method of manufacturing a semiconductor integrated circuit device, and more particularly to a method of fabricating a phase change memory device.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cha, Soonwoo Portland, US 2 8
Lee, Jinwook San Jose, US 49 350
Lee, Jong Won Santa Clara, US 174 1340
Minvielle, Tim San Jose, US 51 416

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