Microelectronic device and electronic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9083309
APP PUB NO 20120133449A1
SERIAL NO

13297692

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanemoto, Yoko Fujimi, JP 6 44

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