Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

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United States of America Patent

PATENT NO 9085146
APP PUB NO 20140111582A1
SERIAL NO

14058111

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Abstract

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A liquid ejecting head includes a piezoelectric element, which is provided above a zirconium oxide layer having a piezoelectric layer and an electrode provided on the piezoelectric layer, in which the zirconium oxide layer is formed through a liquid-phase method and preferentially oriented with a (111) plane.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ohashi, Koji Matsumoto, JP 89 378

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