Electronic device, method of manufacturing the same, and oscillator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9089055
APP PUB NO 20140070900A1
SERIAL NO

14018686

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Abstract

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An electronic device includes a substrate, a cavity part formed above the substrate with a functional device placed therein, a coating structure that defines the cavity part, and the coating structure has a first surrounding wall formed around the cavity part above the substrate, a second surrounding wall formed around the cavity part above the first surrounding wall, a coating layer that defines an upper surface of the cavity part, wherein the second surrounding wall is located inside the first surrounding wall in a plan view.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitano, Yoji Chino, JP 14 15
Okuyama, Norio Suwa, JP 4 3

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