Ceramic coated article and process for applying ceramic coating

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United States of America Patent

PATENT NO 9090046
APP PUB NO 20130273327A1
SERIAL NO

13747292

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Abstract

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To manufacture a ceramic article, a ceramic body comprising Al2O3 is roughened to a roughness of approximately 140 micro-inches (μin) to 240 μin. The ceramic body is subsequently cleaned and then coated with a ceramic coating. The ceramic coating comprises a compound of Y4Al2O9 (YAM) and a solid solution of Y2-xZrxO3. The ceramic coating is then polished.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Agarwal, Sumit San Jose, US 103 2893
Duan, Ren-Guan Fremont, US 70 5695
Kanungo, Biraja P San Jose, US 52 1999
Lubomirsky, Dmitry Cupertino, US 294 27269
Sun, Jennifer Y Mountain View, US 255 11422

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