Microelectromechanical resonators having offset [100] and [110] crystal orientations

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United States of America Patent

PATENT NO 9090451
SERIAL NO

13837854

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Abstract

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A TPoS resonator includes a substrate and a resonator body suspended over the substrate by at least a first pair of fixed supports (e.g., tethers) that attach to first and second ends of the resonator body. The resonator body includes monocrystalline silicon, which has a [100] crystallographic orientation that is offset by ±α degrees relative to a nodal line of the resonator body (e.g., tether-to-tether axis) when the resonator body is operating at a resonant frequency, where a is a real number in a range from about 5 to about 19 and, more preferably, in a range from about 7 to about 17. The resonator may be an extensional-mode resonator and the resonator body may be rectangular-shaped with unequal length and width dimensions.

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Patent Owner(s)

  • INTEGRATED DEVICE TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhugra, Harmeet San Jose, US 23 156
Pan, Wanling San Jose, US 8 74
Ziaei-Moayyed, Maryam Sunnyvale, US 3 42

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