Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

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United States of America Patent

PATENT NO 9097986
APP PUB NO 20130094006A1
SERIAL NO

13690577

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Abstract

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A substrate conveyance device that conveys a substrate having been exposed with a pattern image via a projection optical system and a liquid, the substrate conveyance device comprising: a liquid detector that detects the liquid adhering on the substrate.

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Patent Owner(s)

Patent OwnerAddress
MIYAGI NIKON PRECISION CO LTDZAO-MACHI KATTA-GUN MIYAGI 989-0701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horiuchi, Takashi Kumagaya, JP 141 4058
Ohta, Atsushi Miyagi-ken, JP 88 909

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