Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device

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United States of America Patent

PATENT NO 9099635
SERIAL NO

13770115

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Abstract

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An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kiyose, Kanechika Nagano, JP 101 426
Nakamura, Tomoaki Nagano, JP 151 1981
Tsuruno, Jiro Nagano, JP 32 167

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