Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector

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United States of America Patent

PATENT NO 9099983
APP PUB NO 20130038408A1
SERIAL NO

13654718

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Abstract

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A bulk acoustic wave (BAW) resonator device includes an acoustic reflector formed over a substrate and a resonator stack formed over the acoustic reflector. The acoustic reflector includes multiple acoustic impedance layers. The resonator stack includes a first electrode formed over the acoustic reflector, a piezoelectric layer formed over the first electrode, and a second electrode formed over the piezoelectric layer. A bridge is formed within one of the acoustic reflector and the resonator stack.

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Patent Owner(s)

  • AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burak, Dariusz Fort Collins, US 75 1733
Choy, John Westminster, US 64 2228
Nikkel, Phil Loveland, US 51 1511

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