Semiconductor structures provided within a cavity and related design structures

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United States of America Patent

PATENT NO 9102517
SERIAL NO

13591771

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Abstract

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Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity. The method for forming the cavity further includes forming at least one first vent hole of a first dimension which is sized to avoid or minimize material deposition on a beam structure during sealing processes. The method for forming the cavity further includes forming at least one second vent hole of a second dimension, larger than the first dimension.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION;WISPRY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DeReus, Dana R Santa Ana, US 9 179
Maling, Jeffrey C Grand Isle, US 43 520
Morris,, III Arthur S Raleigh, US 47 313
Stamper, Anthony K Williston, US 613 6580

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