Apparatus and method for three dimensional inspection of wafer saw marks

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 9103665
SERIAL NO

13376391

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus (1) and a method for the three dimensional inspection of saw marks (2) on at least one surface (3) of a wafer (4) are disclosed. At least one camera (6) is required to capture an image of the entire surface (3) of the wafer (4). At least one line projector (8) provides a light bundle (5), centered about a central beam axis (9). The line projector (8) is arranged such that the central beam axis (9) is at an acute angle (α) with regard to the plane (P) of the wafer (4). A line shifter (12) is positioned in the light bundle (5) between each line projector (8) and the surface (3) of the wafer (4). A frame grabber (14) and an image processor (16) are used to synchronize and coordinate the image capture and the position of the pattern (20) of lines (22) on the front side (3F) and/or the back side (3B) of the wafer (4).

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hermans, Laurent Borsbeek, BE 2 2
Hill, Andy San Jose, US 10 25
Maison, Benoit Wavre, BE 13 371
Nijs, Frans Leopoldsburg, BE 3 6
Van, Gils Karel Blanden, BE 6 27
Wouters, Christophe Balen, BE 6 3

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