Template treatment method

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United States of America Patent

PATENT NO 9108343
APP PUB NO 20130127084A1
SERIAL NO

13607305

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Abstract

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According to one embodiment, the template treatment method includes a substrate having a principal surface, a first pattern formed on the principal surface and including a plurality of recesses, and a second pattern formed on the principal surface at a position different from the first pattern and including a plurality of recesses. The first pattern contains a first material and the second pattern contains a second material different from the first material. The second pattern is coated with a coating containing a third material different from the first and second materials. The template is cleaned while the second pattern is coated. After the coating is removed, the second pattern is exposed.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAMINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ota, Takumi Kanagawa-ken, JP 44 208

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