Gas supply system
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United States of America Patent
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Aug 18, 2015
Grant Date -
Jun 28, 2012
app pub date -
Sep 2, 2010
filing date -
Sep 4, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A fluorine gas generation system includes a plurality of fluorine gas supply systems and a controller. Each of the fluorine gas supply systems includes a fluorine gas generation apparatus. Each of the fluorine gas supply systems is connected to a CVD device group. The fluorine gas generation apparatus includes a fluorine gas generator and a buffer tank. An opening/closing valve is inserted through a piping. The other end of the piping is branched into a plurality of pipings. Each of the pipings is connected to CVD devices. Pipings in the adjacent fluorine gas supply systems are connected to each other via a piping. An opening/closing valve is inserted through each of the pipings.
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