Method and device for contacting a row of contact areas with probe tips

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United States of America Patent

PATENT NO 9110131
SERIAL NO

13640432

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Importance

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Abstract

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The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angle α in a range of 0 to 180°.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dietrich, Claus Thiendorf OT Sacka, DE 20 105
Fehrmann, Frank Priestewitz OT Basslitz, DE 11 27
Hirschfeld, Botho Dresden, DE 8 37
Kanev, Stojan Thiendorf OT Sacka, DE 44 174

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