Work piece transfer mechanisms
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United States of America Patent
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Aug 18, 2015
Grant Date -
Oct 10, 2013
app pub date -
Dec 19, 2011
filing date -
Dec 17, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.
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