Laser based processing of layered materials

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United States of America Patent

PATENT NO 9114482
SERIAL NO

13234751

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Abstract

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Systems and methods for laser based processing of layered materials. Methods may include selectively adjusting ultrafast laser output of an ultrafast laser device based upon one or more physical attributes of a layer of the layered material, applying the ultrafast laser output of the ultrafast laser device to the layer of the layered material along a tool path to ablate the layer along the tool path, and then re-executing the steps to ablate one or more additional layers, the re-execution occurring for each distinct layer of the layered material that is to be ablated.

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Patent Owner(s)

  • COHERENT, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Booth, Tim Penngrove, US 6 163
Gaudiosi, David Rohnert Park, US 7 54
Greenberg, Michael Santa Rosa, US 35 339
Mielke, Michael Santa Rosa, US 20 377
Srinivas, Ramanujapuram A San Jose, US 17 1174

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