Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor

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United States of America Patent

PATENT NO 9114997
APP PUB NO 20130084234A1
SERIAL NO

13628282

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Abstract

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Processes for producing polycrystalline silicon by thermal decomposition of silane are disclosed. The processes generally involve thermal decomposition of silane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.

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Patent OwnerAddress
CORNER STAR LIMITEDUNIT 1703B - 1706 LEVEL 17 INTERNATIONAL COMMERCE CENTRE 1 AUSTIN ROAD WEST KOWLOON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhusarapu, Satish Houston, US 27 64
Gupta, Puneet Houston, US 211 3406
Huang, Yue Midlothian, US 82 604

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