Contact probe having carbon film on surface thereof
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United States of America Patent
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Aug 25, 2015
Grant Date -
Feb 28, 2013
app pub date -
May 10, 2011
filing date -
May 10, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A contact probe includes a base material, a carbon film provided on a tip of the contact probe and configured to contact with an electrode, and an intermediate layer provided between the carbon film and the base material. The carbon film includes a metal element. A concentration of the metal element in the carbon film surface is lower than an average concentration of the metal element in a whole of the carbon film. The carbon film further includes: a plurality of layers, each of the plurality of layers having a uniform concentration of the metal element along a direction of a thickness of the carbon film; a layer in which the concentration of the metal element is continuously changed along a direction of a thickness of the carbon film; or both thereof.
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