Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith
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United States of America Patent
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Aug 25, 2015
Grant Date -
May 2, 2013
app pub date -
Oct 25, 2012
filing date -
Oct 26, 2011
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Abstract
An apparatus and method for characterizing a particle beam provides receiving a particle beam in a central region of a reduced pressure enclosure; impacting the received beam against a beam strike that is thermally isolated from the enclosure; measuring a temperature change of the beam strike due to the impacting beam; measuring a pressure change in the enclosure due to receiving the beam; and processing the measured temperature change and the measured pressure change to determine beam characteristics.
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