Antenna unit for generating plasma and substrate processing apparatus including the same

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United States of America Patent

PATENT NO 9117634
APP PUB NO 20120090785A1
SERIAL NO

13272235

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Abstract

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An antenna unit for generating a plasma includes: a first antenna including a first incoming portion and a plurality of first sub-antennas divided from the first incoming portion; and a second antenna including a second incoming portion and a plurality of second sub-antennas divided from the second incoming portion, the first and second incoming portions constituting a coaxial line.

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Patent Owner(s)

Patent OwnerAddress
JUSUNG ENGINEERING CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jang, Yong-Jun Jeju-si, KR 12 72

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