Method for filling recesses using pre-treatment with hydrocarbon-containing gas
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United States of America Patent
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Aug 25, 2015
Grant Date -
Dec 11, 2014
app pub date -
Jun 7, 2013
filing date -
Jun 7, 2013
priority date (Note) -
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Abstract
A method for filling recesses of a substrate with an insulation film includes: (i) exposing surfaces of the recesses of the substrate to a pre-deposition gas in a reactive state in a reaction space to treat the surfaces with reactive hydrocarbons generated from the pre-deposition gas without filling the recesses; and (ii) depositing a flowable insulation film using a process gas other than the pre-deposition gas on a surface of the substrate to fill the recesses treated in step (i) therewith by plasma reaction. The pre-deposition gas has at least one hydrocarbon unit in its molecule.
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