Graphene interconnection and method of manufacturing the same

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United States of America Patent

PATENT NO 9117885
APP PUB NO 20120080662A1
SERIAL NO

13216445

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Abstract

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According to one embodiment, a graphene interconnection includes a first insulating film, a first catalyst film, and a first graphene layer. A first insulating film includes an interconnection trench. A first catalyst film is formed on the first insulating film on both side surfaces of the interconnection trench. A first graphene layer is formed on the first catalyst film on the both side surfaces of the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to the both side surfaces.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kajita, Akihiro Yokohama, JP 77 788
Saito, Tatsuro Yokohama, JP 40 208
Wada, Makoto Yokohama, JP 118 1297

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