Imprint method, imprint apparatus, and article manufacturing method

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United States of America Patent

PATENT NO 9128371
APP PUB NO 20120321797A1
SERIAL NO

13478287

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Abstract

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An imprint method includes an inspection step of inspecting a substrate to obtain information of a foreign substance on the substrate; and a film forming step of forming a film covering the foreign substance, using the information of a foreign substance on the substrate, wherein the film forming step is performed before the contact step.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurosawa, Hiroshi Utsunomiya, JP 66 728

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