Semiconductor memory device and method for manufacturing the same

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United States of America Patent

PATENT NO 9129995
APP PUB NO 20150054047A1
SERIAL NO

14107492

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Abstract

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According to one embodiment, a semiconductor memory device includes a semiconductor substrate, a first insulating film provided on the semiconductor substrate, a silicon film provided on the first insulating film, a metal silicide film provided on the silicon film, a second insulating film provided on the metal silicide film, and an electrode provided on the second insulating film.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murakoshi, Atsushi Mie-ken, JP 51 1016
Nakajima, Kazuaki Mie-ken, JP 94 1183

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