Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element
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United States of America Patent
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Sep 15, 2015
Grant Date -
Dec 12, 2013
app pub date -
Jun 5, 2013
filing date -
Jun 6, 2012
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Abstract
A resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is ΔH, 0%<ΔH/H≦0.085% is satisfied as a relationship between H and ΔH.
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