Piezoelectric device

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United States of America Patent

PATENT NO 9136820
APP PUB NO 20140035440A1
SERIAL NO

13563169

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric device according to the present invention is provided with a pair of electrode films, a piezoelectric film sandwiched in between the pair of electrode films, and a stress control film which is in direct contact with a surface of at least one of the pair of electrode films, on the side where the electrode film is not in contact with the piezoelectric film, and which has a linear expansion coefficient larger than those of the relevant electrode film and the piezoelectric film.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aida, Yasuhiro Tokyo, JP 28 137
Kurachi, Katsuyuki Tokyo, JP 20 141
Maejima, Kazuhiko Tokyo, JP 29 301
Sakuma, Hitoshi Tokyo, JP 54 270

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