Electromechanical transducer device and method of making the same

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United States of America Patent

PATENT NO 9143877
APP PUB NO 20110018387A1
SERIAL NO

12839701

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Abstract

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Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kato, Kazuhiko Tokyo, JP 129 1477
Ogawa, Toshiyuki Yokohama, JP 61 829
Takagi, Makoto Kawasaki, JP 93 1508

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