Thin film piezoelectric element, thin film piezoelectric actuator, and thin film piezoelectric sensor; and hard disk drive, and inkjet printer

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United States of America Patent

PATENT NO 9147826
APP PUB NO 20150207057A1
SERIAL NO

14162211

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An object is to increase the amount of displacement of a thin-film piezoelectric element including a piezoelectric thin film having an uneven-shaped contact surface with the planar shape and the layer structure of the thin-film piezoelectric element kept unchanged. The thin-film piezoelectric element includes a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, in which a surface roughness P-V of an interface between the piezoelectric thin film and at least one of the pair of electrode layers is 220 nm or more and 500 nm or less.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maejima, Kazuhiko Tokyo, JP 29 301
Sakuma, Hitoshi Tokyo, JP 54 270

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