Fluid control device
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United States of America Patent
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Oct 6, 2015
Grant Date -
Mar 7, 2013
app pub date -
Sep 5, 2012
filing date -
Sep 6, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate including a first main surface and a second main surface, and a frame plate surrounding the surroundings of the vibrating plate. The driver is provided on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate has a hole formed thereon. Furthermore, the flexible plate faces the second main surface of the vibrating plate, and adheres to the frame plate by the adhesive agent that contains a plurality of particles arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.
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